Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2013 Vol. 31; Iss. 1
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Tailoring the composition of lead zirconate titanate by atomic layer deposition
Choi, Ju H., Zhang, Feng, Perng, Ya-Chuan, Chang, Jane P.Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4775789
File:
PDF, 1.36 MB
english, 2013