Comparison of surface vacuum ultraviolet emissions with...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2015 / 03 Vol. 33; Iss. 2

Comparison of surface vacuum ultraviolet emissions with resonance level number densities. II. Rare-gas plasmas and Ar-molecular gas mixtures

Boffard, John B., Lin, Chun C., Wang, Shicong, Wendt, Amy E., Culver, Cody, Radovanov, Svetlana, Persing, Harold
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4904036
Date:
March, 2015
File:
PDF, 1.32 MB
english, 2015
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