Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1999 Vol. 17; Iss. 4
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Multilayer resist films applicable to nanopatterning of insulating substrates based on current-injecting scanning probe lithography
Sugimura, Hiroyuki, Takai, Osamu, Nakagiri, NobuyukiVolume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.590798
File:
PDF, 774 KB
english, 1999