Multilayer resist films applicable to nanopatterning of...

Multilayer resist films applicable to nanopatterning of insulating substrates based on current-injecting scanning probe lithography

Sugimura, Hiroyuki, Takai, Osamu, Nakagiri, Nobuyuki
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.590798
File:
PDF, 774 KB
english, 1999
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