High-resolution x-ray masks for high aspect ratio...

High-resolution x-ray masks for high aspect ratio microelectromechanical systems applications

Christenson, Todd
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Volume:
3
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.1753271
Date:
July, 2004
File:
PDF, 645 KB
english, 2004
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