Effect of process parameters and packing density on...

Effect of process parameters and packing density on dimensional errors for densely packed high-aspect-ratio SU-8 microstructures in x-ray lithography

Shew, Bor-Yaun
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Volume:
6
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2712869
Date:
January, 2007
File:
PDF, 169 KB
english, 2007
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