Period and height control during the microcontact printing...

Period and height control during the microcontact printing of alkoxysilane for optical gratings

Benahmed, Arnaud
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Volume:
6
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.2731384
Date:
April, 2007
File:
PDF, 373 KB
english, 2007
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