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Lifting, welding, and packaging of a quality-factor-controllable micromachined inductor using magnetic fields
Jang, Ben-HwaVolume:
9
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.3528431
Date:
October, 2010
File:
PDF, 680 KB
english, 2010