Geometrically desensitized interferometry for shape...

Geometrically desensitized interferometry for shape measurement of flat surfaces and 3-D structures

de Groot, Peter
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Volume:
39
Language:
english
Journal:
Optical Engineering
DOI:
10.1117/1.602339
Date:
January, 2000
File:
PDF, 346 KB
english, 2000
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