Free-standing spectral purity filters for extreme...

Journal of Micro/Nanolithography MEMS and MOEMS 2012 / 05 Vol. 11; Iss. 2

Free-standing spectral purity filters for extreme ultraviolet lithography

Chkhalo, Nikolay I., Drozdov, Mikhail N., Kluenkov, Evgeny B., Lopatin, Aleksei Ya., Luchin, Valerii I., Salashchenko, Nikolay N., Tsybin, Nikolay N., Sjmaenok, Leonid A., Banine, Vadim E., Yakunin, A
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
11
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.jmm.11.2.021115
Date:
May, 2012
File:
PDF, 1.70 MB
english, 2012
Conversion to is in progress
Conversion to is failed