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SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, United States (Sunday 25 August 2013)] Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII - 6-DOF displacement and angle measurements using heterodyne laser encoder
Pan, Ssu-Wen, Hsieh, Hung-Lin, Wang, Wei-Cheng, Postek, Michael T., Orji, Ndubuisi GeorgeVolume:
8819
Year:
2013
Language:
english
DOI:
10.1117/12.2024082
File:
PDF, 967 KB
english, 2013