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SPIE Proceedings [SPIE The Hague '90, 12-16 April - The Hague, Netherlands (Thursday 1 March 1990)] In-Process Optical Measurements and Industrial Methods - Noninvasive measurement of ion currents in plasma-assisted processes using an optical fiber Faraday ring ammeter
Guenther, Karl H., Saxena, Indu F., Torbert, Roy B., Macleod, H. A., Langenbeck, PeterVolume:
1266
Year:
1990
Language:
english
DOI:
10.1117/12.20266
File:
PDF, 186 KB
english, 1990