![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, United States (Sunday 25 August 2013)] Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII - Nanomanufacturing concerns about measurements made in the SEM II: specimen contamination
Postek, Michael T., Vladár, András E., Purushotham, Kavuri P., Postek, Michael T., Orji, Ndubuisi GeorgeVolume:
8819
Year:
2013
Language:
english
DOI:
10.1117/12.2027060
File:
PDF, 442 KB
english, 2013