SPIE Proceedings [SPIE SPIE's 1995 Symposium on...

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SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Optical/Laser Microlithography VIII - Implementation of i-line lithography to 0.30 um design rules

Kim, KeunYoung, Kim, Hung-Eil, Lee, Il-Ho, Kim, Jin-Soo, Chun, Jun-Sung, Hur, Ikboum, Moon, Seung-Chan, Baik, Ki-Ho, Choi, Soo-Han, Brunner, Timothy A.
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Volume:
2440
Year:
1995
Language:
english
DOI:
10.1117/12.209286
File:
PDF, 489 KB
english, 1995
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