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SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Lithographic and Micromachining Techniques for Optical Component Fabrication - Testing of aspheric surfaces

Tiziani, Hans J., Reichelt, Stephan, Pruss, Christof, Rocktaeschel, M., Hofbauer, U., Kley, Ernst-Bernhard, Herzig, Hans Peter
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Volume:
4440
Year:
2001
Language:
english
DOI:
10.1117/12.448030
File:
PDF, 839 KB
english, 2001
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