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SPIE Proceedings [SPIE Second International Symposium on Laser Precision Micromachining - Singapore, Singapore (Wednesday 16 May 2001)] Second International Symposium on Laser Precision Microfabrication - Laser cleaning of silicon wafers: mechanisms and efficiencies
Mosbacher, Mario, Bertsch, M., Muenzer, H.-J., Dobler, V., Runge, B.-U., Baeuerle, Dieter, Boneberg, Johannes, Leiderer, Paul, Miyamoto, Isamu, Lu, Yong Feng, Sugioka, Koji, Dubowski, Jan J.Volume:
4426
Year:
2002
Language:
english
DOI:
10.1117/12.456821
File:
PDF, 360 KB
english, 2002