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SPIE Proceedings [SPIE NDE For Health Monitoring and Diagnostics - San Diego, CA (Sunday 17 March 2002)] Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems - Measurement and simulation of the laser-based thermo-elastic excitation and propagation of acoustic pulses for thin film and MEMS inspection
Profunser, Dieter M., Vollmann, Jacqueline, Bryner, Jurg, Dual, Jurg, Meyendorf, Norbert, Baaklini, George Y., Michel, BerndVolume:
4703
Year:
2002
DOI:
10.1117/12.469627
File:
PDF, 706 KB
2002