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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2005 - Sevilla, Spain (Monday 9 May 2005)] Smart Sensors, Actuators, and MEMS II - Development of a novel piezo-driven parallel-kinematics single crystal silicon micropositioning XY stage
Yao, Qing, Ferreira, Placid M., Mukhopadhyay, Deepkishore, Cane, Carles, Chiao, Jung-Chih, Vidal Verdu, FernandoVolume:
5836
Year:
2005
Language:
english
DOI:
10.1117/12.605632
File:
PDF, 275 KB
english, 2005