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SPIE Proceedings [SPIE 22nd European Mask and Lithography Conference - Dresden, Germany (Monday 23 January 2006)] 22nd European Mask and Lithography Conference - Nanoimprint lithography techniques: an introduction
Scheer, H.-C., Behringer, Uwe F. W.Volume:
6281
Year:
2006
Language:
english
DOI:
10.1117/12.692648
File:
PDF, 213 KB
english, 2006