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SPIE Proceedings [SPIE European Mask and Lithography Conf 2007 - Grenoble, France (Monday 22 January 2007)] 23rd European Mask and Lithography Conference - Challenges of residual layer minimisation in thermal nanoimprint lithography
Bogdanski, Nicolas, Wissen, Matthias, Möllenbeck, Saskia, Scheer, Hella-Christin, Behringer, Uwe F. W.Volume:
6533
Year:
2007
Language:
english
DOI:
10.1117/12.736926
File:
PDF, 184 KB
english, 2007