SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Formation of thin ZrO2 layers for nanotransistor gate structures by electron beam evaporation
Drozdov, D. G., Khorin, I. A., Kopylov, V. B., Orlikovsky, A. A., Rogozhin, A. E., Vasiliev, A. G., Valiev, Kamil A., Orlikovsky, Alexander A.Year:
2012
Language:
english
DOI:
10.1117/12.802425
File:
PDF, 255 KB
english, 2012