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SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging 2011 - Beijing, China (Tuesday 24 May 2011)] International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies - Closed-loop control of a MOEMS mirror integrated with angle sensor
Qian, Rong-rong, Wen, Zhi-yu, Chen, Li, Wen, Zhongquan, Luo, Biao, Wang, Yuelin, Xie, Huikai, Jin, YufengVolume:
8191
Year:
2011
Language:
english
DOI:
10.1117/12.900831
File:
PDF, 12.76 MB
english, 2011