SPIE Proceedings [SPIE 1982 Los Angeles Technical Symposium - Los Angeles (Wednesday 27 January 1982)] Semiconductor Growth Technology - Reflecting On Metalorganic Chemical Vapor Deposition (MOCVD)
Manasevit, H. M., Krikorian, EstherVolume:
323
Year:
1982
Language:
english
DOI:
10.1117/12.934281
File:
PDF, 186 KB
english, 1982