EFFECT OF N CONTENT ON THE THERMAL STABILITY OF Ta–Si–N...

International Journal of Modern Physics B 2010 / 12 Vol. 24; Iss. 30

EFFECT OF N CONTENT ON THE THERMAL STABILITY OF Ta–Si–N THIN FILM BARRIER LAYER

ZHOU, JICHENG, LIU, ZHENG, ZHENG, XUQIANG, LI, YOUZHEN, LUO, DITIAN
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Volume:
24
Language:
english
Journal:
International Journal of Modern Physics B
DOI:
10.1142/s0217979210057420
Date:
December, 2010
File:
PDF, 341 KB
english, 2010
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