FACET PREPARATION OF SILICON NANO-WAVEGUIDES BY CLEAVING...

Journal of Nonlinear Optical Physics & Materials 2011 / 12 Vol. 20; Iss. 4

FACET PREPARATION OF SILICON NANO-WAVEGUIDES BY CLEAVING THE SOI CHIP

MAHDI, SHAIMAA, GREHN, MORITZ, AL-SAADI, AWS, HÖFNER, MICHAEL, MEISTER, STEFAN, EICHLER, HANS J.
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Volume:
20
Language:
english
Journal:
Journal of Nonlinear Optical Physics & Materials
DOI:
10.1142/s0218863511006315
Date:
December, 2011
File:
PDF, 642 KB
english, 2011
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