Mechanism of Secondary Ion Emission from Silicon Dioxide...

Japanese Journal of Applied Physics 1995 / 4 Vol. 34; Iss. Part 1, No

Mechanism of Secondary Ion Emission from Silicon Dioxide Bombarded with Argon Ions

Tamaki, Shozo, Yamauchi, Naohiko, Kuroda, Tsukasa, HideichiYagi,
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Volume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.34.1968
Date:
April, 1995
File:
PDF, 671 KB
1995
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