Ab initio Molecular Orbital Study of Water Absorption and...

Japanese Journal of Applied Physics 1997 / 4 Vol. 36; Iss. Part 1, No

Ab initio Molecular Orbital Study of Water Absorption and Hydrolysis of Chemical Vapor Deposited SiOF Films I

Nakasaki, Yasushi, Miyajima, Hideshi, Katsumata, Ryota, Hayasaka, Nobuo
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.36.2533
Date:
April, 1997
File:
PDF, 2.32 MB
1997
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