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Mechanism of Molten KOH Etching of SiC Single Crystals: Comparative Study with Thermal Oxidation
Katsuno, Masakazu, Ohtani, Noboru, Takahashi, Jun, Yashiro, Hirokatsu, Kanaya, MasatoshiVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.38.4661
Date:
August, 1999
File:
PDF, 101 KB
english, 1999