Effects of Oxygen Concentration on Characteristics of...

Japanese Journal of Applied Physics 2001 / 3 Vol. 40; Iss. Part 1, No

Effects of Oxygen Concentration on Characteristics of RF-Sputtered In 2 O 3 –ZnO Thin Films

Park, Seoung-Hwan, Kim, Hwa-Min, Rhee, Byung-Roh, Ko, Eun-Young, Shon, Sang-Ho
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Volume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.40.1429
Date:
March, 2001
File:
PDF, 353 KB
english, 2001
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