Fabrication of Piezoelectric Thin Film Resonators with...

Japanese Journal of Applied Physics 2002 / 5 Vol. 41; Iss. Part 1, No

Fabrication of Piezoelectric Thin Film Resonators with Acoustic Quarter-Wave Multilayers

Kobayashi, Hideaki, Ishida, Yasuaki, Ishikawa, Kazuo, Doi, Arata, Nakamura, Kiyoshi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.41.3455
Date:
May, 2002
File:
PDF, 88 KB
english, 2002
Conversion to is in progress
Conversion to is failed