Nanometrology of Si Nanostructures Embedded in SiO...

Japanese Journal of Applied Physics 2003 / 1 Vol. 42; Iss. Part 1, No

Nanometrology of Si Nanostructures Embedded in SiO 2 using Scanning Electron Microscopy

Nagase, Masao, Fujiwara, Akira, Kurihara, Kenji, Namatsu, Hideo
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.42.318
Date:
January, 2003
File:
PDF, 339 KB
english, 2003
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