High-Quality Crystalline Silicon Layer Grown by Liquid...

Japanese Journal of Applied Physics 2003 / 3 Vol. 42; Iss. Part 2, No

High-Quality Crystalline Silicon Layer Grown by Liquid Phase Epitaxy Method at Low Growth Temperature

Ujihara, Toru, Obara, Kazuo, Usami, Noritaka, Fujiwara, Kozo, Sazaki, Gen, Shishido, Toetsu, Nakajima, Kazuo
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.42.l217
Date:
March, 2003
File:
PDF, 121 KB
english, 2003
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