RF Micro-Electro-Mechanical Systems Capacitive Switches...

Japanese Journal of Applied Physics 2006 / 1 Vol. 45; Iss. 1A

RF Micro-Electro-Mechanical Systems Capacitive Switches Using Ultra Thin Hafnium Oxide Dielectric

Zhang, Yi, Onodera, Kazumasa, Maeda, Ryutaro
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.45.300
Date:
January, 2006
File:
PDF, 507 KB
english, 2006
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