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Formation Kinetics and Work Function Tuning of Pd 2 Si Fully Silicided Metal Gate
Hosoi, Takuji, Sano, Kosuke, Hosawa, Kosei, Shibahara, KentaroVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.46.1929
Date:
April, 2007
File:
PDF, 377 KB
english, 2007