Kinetics of Subsurface Formation during Metal–Organic Vapor...

Japanese Journal of Applied Physics 2008 / 3 Vol. 47; Iss. 3

Kinetics of Subsurface Formation during Metal–Organic Vapor Phase Epitaxy Growth of InP and InGaP

Nakano, Takayuki, Sugiyama, Masakazu, Nakano, Yoshiaki, Shimogaki, Yukihiro
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.47.1473
Date:
March, 2008
File:
PDF, 336 KB
english, 2008
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