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In situ Metal Mask for Selective Area Growth of Thin Epitaxial Layers
Ohkouchi, Shunsuke, Ozaki, Nobuhiko, Takata, Yoshiaki, Kitagawa, Yoshinori, Nakamura, Yusui, Ikeda, Naoki, Sugimoto, Yoshimasa, Asakawa, KiyoshiVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.47.2987
Date:
April, 2008
File:
PDF, 145 KB
english, 2008