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A Novel Fabrication Method for Forming Inclined Groove-Based Microstructures Using Optical Elements
Huang, Ying-Jui, Chang, Tien-Li, Chou, Hwai-Pwu, Lin, Cheng-HsuanVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.47.5287
Date:
June, 2008
File:
PDF, 437 KB
english, 2008