Growth of GaN Films by Hot-Mesh Chemical Vapor Deposition...

Japanese Journal of Applied Physics 2008 / 1 Vol. 47; Iss. 1

Growth of GaN Films by Hot-Mesh Chemical Vapor Deposition Using Ruthenium-Coated Tungsten Mesh

Fukada, Yusuke, Yasui, Kanji, Kuroki, Yuichiro, Suemitsu, Maki, Ito, Takashi, Endou, Tetsuro, Nakazawa, Hideki, Narita, Yuzuru, Takata, Masasuke, Akahane, Tadashi
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.47.573
Date:
January, 2008
File:
PDF, 869 KB
english, 2008
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