In situ Gravimetric Monitoring of Thermal...

Japanese Journal of Applied Physics 2009 / 9 Vol. 48; Iss. 9

In situ Gravimetric Monitoring of Thermal Decomposition and Hydrogen Etching Rates of 6H-SiC(0001) Si Face

Akiyama, Kazuhiro, Ishii, Yasuhiro, Abe, Sohei, Murakami, Hisashi, Kumagai, Yoshinao, Okumura, Hironori, Kimoto, Tsunenobu, Suda, Jun, Koukitu, Akinori
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.48.095505
Date:
September, 2009
File:
PDF, 438 KB
english, 2009
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