Dry Etching of Al-Rich AlGaAs for Photonic Crystal Fabrication
Mochizuki, Masaya, Kitabayashi, Yuta, Nakajima, Tomoya, Satoi, Daiki, Ishikawa, Fumitaro, Kondow, Masahiko, Hara, Makoto, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, TakashiVolume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.50.04dg15
Date:
April, 2011
File:
PDF, 940 KB
english, 2011