Transparent Conductive Properties of TiO$_{x}$ and Nb-Doped TiO$_{x}$ Films Produced by Reactive Co-Sputtering from Ti and Nb$_{2}$O$_{5}$ Targets
Akazawa, HouseiVolume:
51
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.51.015803
Date:
January, 2012
File:
PDF, 1.48 MB
english, 2012