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In Situ FTIR Characterization of Growth Inhibition in Atomic Layer Deposition Using Reversible Surface Functionalization
Yanguas-Gil, A., Libera, J. A., Elam, J. W.Volume:
50
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05013.0043ecst
Date:
March, 2013
File:
PDF, 199 KB
english, 2013