A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime
Jelinek, M., Laven, J., Job, R., Schustereder, W., Schulze, H.-J., Rommel, M., Frey, L.Volume:
64
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/06411.0199ecst
Date:
August, 2014
File:
PDF, 1.38 MB
english, 2014