Effect of Post-Treatment Temperature on TiN Barrier Properties during a Two-Step Annealing for (Ba, Sr)TiO[sub 3] Dielectric Film
Yoon, Dong-Soo, Hong, Kwon, Roh, Jae SungVolume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1360188
File:
PDF, 1.41 MB
english, 2001