Effect of Post-Treatment Temperature on TiN Barrier...

Effect of Post-Treatment Temperature on TiN Barrier Properties during a Two-Step Annealing for (Ba, Sr)TiO[sub 3] Dielectric Film

Yoon, Dong-Soo, Hong, Kwon, Roh, Jae Sung
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Volume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1360188
File:
PDF, 1.41 MB
english, 2001
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