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Investigation of Czochralski Silicon Grown with Different Interstitial Oxygen Concentrations and Point Defect Populations
Sama, S., Porrini, M., Fogale, F., Servidori, M.Volume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1388887
File:
PDF, 475 KB
english, 2001