A Direct Approach for Evaluating the Thermal Condition of a...

A Direct Approach for Evaluating the Thermal Condition of a Silicon Substrate under Infrared Rays and Specular Reflectors

Habuka, Hitoshi
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Volume:
146
Year:
1999
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1391669
File:
PDF, 392 KB
english, 1999
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