Effect of Annealing Conditions on a Hafnium Oxide...

Effect of Annealing Conditions on a Hafnium Oxide Reinforced SiO[sub 2] Gate Dielectric Deposited by Plasma-Enhanced Metallorganic CVD

Choi, Kyu-Jeong, Shin, Woong-Chul, Yoon, Soon-Gil
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Volume:
149
Year:
2002
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1450617
File:
PDF, 333 KB
english, 2002
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