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Chemically Bonded Porogens in Methylsilsesquioxane
Padovani, Agnes M., Rhodes, Larry, Bidstrup Allen, Sue Ann, Kohl, Paul A.Volume:
149
Year:
2002
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1515281
File:
PDF, 599 KB
english, 2002