Highly Selective Etching of GaAs on Al[sub 0.2]Ga[sub...

Electrochemical and Solid-State Letters 2004 Vol. 7; Iss. 11

Highly Selective Etching of GaAs on Al[sub 0.2]Ga[sub 0.8]As Using Citric Acid/H[sub 2]O[sub 2]/H[sub 2]O Etching System

Liao, Chin-I., Houng, Mau-Phon, Wang, Yeong-Her
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Volume:
7
Year:
2004
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1803072
File:
PDF, 491 KB
english, 2004
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