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Processing and Characterization of Fluorinated Amorphous Carbon Low-Dielectric-Constant Films
Chen, Hung-Jen, Chang, Shou-Yi, Chiue, Hua-Chun, Lai, Wei-Shun, Lin, Su-JienVolume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1803835
File:
PDF, 445 KB
english, 2004