Drive Current Enhancement in Sub-50 nm CMOS by Reduction of SDE Resistance with Laser Thermal Process
Yamamoto, Tomonari, Goto, Ken-ichi, Kubo, Tomohiro, Wang, Yun, Lin, Tim, Talwar, Somit, Kase, Masataka, Sugii, ToshihiroVolume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1814454
File:
PDF, 483 KB
english, 2004